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2Gen Pe-Cvd System

(1.3)
Supplier From South Korea (Republic Of Korea)
May-20-13

ITEM DESCRIPTION

Substrate Size 156mm² solar wafer, 4pcs

Deposition Direction Downward

Plasma Source RF & VHF Power Supply

Process Gas Any of Requested Gas (Solar : Si3N4,SiO2,Al2O3)

Process Temperature ~ 700 C

Uniformity ±3%

Heating Uniformity ±3%

Full Automation Control, Load Lock System

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