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Large Scale In-Line Sputtering System

(1.3)
Supplier From South Korea (Republic Of Korea)
May-20-13

ITEM DESCRIPTION

Substrate Size 156mm² solar wafer, 12pcs(3.5G case, Option)

Sputtering Source based 1set (Option), Aprox 100 x 800m² 8T

Process Gas Ar,O2,N2

Deposition Direction Up or Downward

Al Film Thickness 2m

Uniformity WIW,WTW,RTR ±5%.

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