PFA Cassette / Teflon Cassette, Capacitor of wafer can be customized and designed by customers' request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~220 C, use to deliver wafers in acid & base process of Fabrication factory.
The Wafer Carrier is made from PFA, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~260 C, use to deliver wafers in acid & base process of Fabrication factory.
Low profile design allows the greatest possible wafer exposure to increase cleaning and drying efficiency. Enhanced stability for horizontal wafer handling.
H-shaped end for equipment interface. Solid end wall. Wash slots in side walls. Improved predictability of wafer .