aTDS is composed together with EFEM, Wafer Transfer Robot for full automation in 300mm wafer analysis, and possible to be provided as core component of various options as well as QMS such as 100, 200, 300, 500 amu and so on according to the request of customer.
Please ask detailed and specific
questions about Pricing, Minimum Order Quantity, Delivery Timelines etc. Detailed Messages
result in prompt responses.
