FS5001B series mass flow sensors are designed for general purpose flow monitoring and control applications. The sensors directly measure mass flow in the designed channel with trace flow detection capability. The lowest flow it can detect is 20 uL/min. These sensors can readily be applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen flush monitoring and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.

FS5001 can be configured to measure flow full scale from 100 sccm to 1000 sccm (1 SLPM). With a full spectrum of customizable adaptors, it can be plug-and-play in many applications.

Features and Applications
- Low mass flow detectable from 0 ~ 200 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of 2.0%
- Response time < 10 ms
- Pressure rating up to 5 bar (73 psi)
- Output: analog or both analog and digital